This paper deals with the theory, fabrication and characterization of micro diaphragm pumps with active valves. Three types of micropumps with piezoelectric actuation are presented. Special emphasis is given on the accordance of theory and experiment. The theory is based on a lumped-element approach that is reduced to its basics to enable a reasonable accuracy with a minimized set of conceptional parameters. The experimental results fit well to the theory. The fabrication technology of the micropumps comprises of a silicon bulk micromechanics process in combination with a back-end gluing process of piezoelectric PZT-disks (PZT lead-circonat-titanat) to the silicon diaphragms. The micropumps were developed for different applications. The three- and the four-diaphragm micropumps were designed as high performance drivers for an artificial sphincter prosthesis. They show a maximum flowrate of 4 ml/min and a maximum sustainable backpressure of up to 70 kPa. The two-diaphragm micropump was engineered for an implantable drug delivery device and features a pressure independent dosing for backpressures up to 20 kPa.
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ASME 2006 2nd Joint U.S.-European Fluids Engineering Summer Meeting Collocated With the 14th International Conference on Nuclear Engineering
July 17–20, 2006
Miami, Florida, USA
Conference Sponsors:
- Fluids Engineering Division
ISBN:
0-7918-4751-9
PROCEEDINGS PAPER
Design of Micro Diaphragm Pumps With Active Valves
Frank Goldschmidtbo¨ing,
Frank Goldschmidtbo¨ing
University of Freiburg, Freiburg, Germany
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Alexander Doll,
Alexander Doll
University of Freiburg, Freiburg, Germany
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Andreas Geipel,
Andreas Geipel
University of Freiburg, Freiburg, Germany
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Martin Wischke,
Martin Wischke
University of Freiburg, Freiburg, Germany
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Peter Woias
Peter Woias
University of Freiburg, Freiburg, Germany
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Frank Goldschmidtbo¨ing
University of Freiburg, Freiburg, Germany
Alexander Doll
University of Freiburg, Freiburg, Germany
Andreas Geipel
University of Freiburg, Freiburg, Germany
Martin Wischke
University of Freiburg, Freiburg, Germany
Peter Woias
University of Freiburg, Freiburg, Germany
Paper No:
FEDSM2006-98506, pp. 855-863; 9 pages
Published Online:
September 5, 2008
Citation
Goldschmidtbo¨ing, F, Doll, A, Geipel, A, Wischke, M, & Woias, P. "Design of Micro Diaphragm Pumps With Active Valves." Proceedings of the ASME 2006 2nd Joint U.S.-European Fluids Engineering Summer Meeting Collocated With the 14th International Conference on Nuclear Engineering. Volume 2: Fora. Miami, Florida, USA. July 17–20, 2006. pp. 855-863. ASME. https://doi.org/10.1115/FEDSM2006-98506
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