We report on a simple and effective process that allows direct imprinting of micro- and nanostructures on non-flat surfaces. A thin polydimethylsiloxane (PDMS) stamp having micro/nanogratings was placed between a metallic bar with a trapezoidal cross section or a metallic pellet and a flat polymethyl methacrylate (PMMA) substrate, followed by hot embossing at 200°C. During the hot embossing process, the metallic bar/pellet is pushed into the PMMA sheet forming a millimeter scale channel or a curved surface. Due to the presence of the PDMS stamp between the metallic object and the substrate, micro/nanostructures are produced into the channel or over the curved surface. With this method, we have successfully demonstrated micro- and nanostructures down to 300 nm wide gratings on non-flat substrates, as confirmed by scanning electron microscopy and atomic force microscopy. The process so developed will fill the gap in current micro- and nanofabrication technologies in that most of the technologies allow for patterning only on planar substrates.
- Nanotechnology Institute
Nanostructuring Curved Surfaces Using a Flexible Stamp
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Farshchian, B, Lee, J, & Park, S. "Nanostructuring Curved Surfaces Using a Flexible Stamp." Proceedings of the ASME 2009 7th International Conference on Nanochannels, Microchannels, and Minichannels. ASME 2009 7th International Conference on Nanochannels, Microchannels and Minichannels. Pohang, South Korea. June 22–24, 2009. pp. 481-484. ASME. https://doi.org/10.1115/ICNMM2009-82282
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