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Proceedings Papers

Minkowski Sums: A Simulation Tool for CAD/CAM

Proc. ASME. CIE92, ASME 1992 International Computers in Engineering Conference: Volume 1 — Artificial Intelligence; Expert Systems; CAD/CAM/CAE; Computers in Fluid Mechanics/Thermal Systems, 447-456, August 2–6, 1992

Paper No: CIE1992-0053

DOI: https://doi.org/10.1115/CIE1992-0053

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Topics: Computer-aided design, Simulation, Algorithms, Path planning, Algebra, Computation, Etching, Interpolation, Process simulation, Robots

Proceedings Papers

Etch Rate Modeling in MEMS Design

Ted J. Hubbard, Erik K. Antonsson

Proc. ASME. DETC-CIE96, Volume 1: Design for Manufacturing Conference, V001T01A046, August 18–22, 1996

Paper No: 96-DETC/DFM-1310

DOI: https://doi.org/10.1115/96-DETC/DFM-1310

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Topics: Design, Design for Manufacturing, Etching, Microelectromechanical systems, Modeling, Chemical etching, Computer-aided design, Shapes, Silicon, Three-dimensional models

Proceedings Papers

Design Considerations for Manufacturability of MEMS Comb Actuators

Hrishikesh Dixit, Dean L. Taylor, Srikanth Kannapan

Proc. ASME. DETC-CIE96, Volume 1: Design for Manufacturing Conference, V001T01A047, August 18–22, 1996

Paper No: 96-DETC/DFM-1311

DOI: https://doi.org/10.1115/96-DETC/DFM-1311

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Topics: Actuators, Design, Design for Manufacturing, Microelectromechanical systems, Manufacturing, Parametric design, Chemical vapor deposition, Etching, Integrated circuits, Lithography

Proceedings Papers

Design of MEMS via Efficient Simulation of Fabrication

Ted J. Hubbard, Erik K. Antonsson

Proc. ASME. DETC-CIE96, Volume 1: Design for Manufacturing Conference, V001T01A048, August 18–22, 1996

Paper No: 96-DETC/DFM-1312

DOI: https://doi.org/10.1115/96-DETC/DFM-1312

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Topics: Design, Design for Manufacturing, Manufacturing, Microelectromechanical systems, Simulation, Simulation results, Etching

Proceedings Papers

Evolutionary Techniques in MEMS Synthesis

Hui Li, Erik K. Antonsson

Proc. ASME. DETC98, Volume 1A: 25th Biennial Mechanisms Conference, V01AT01A006, September 13–16, 1998

Paper No: DETC98/MECH-5840

DOI: https://doi.org/10.1115/DETC98/MECH-5840

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Topics: Microelectromechanical systems, Shapes, Genetic algorithms, Manufacturing, Simulation, Etching

Proceedings Papers

Improving Linearity of Circular Capacitive Pressure Sensor by Using a Dimple Mask

Md Ebrahim Khalil Bhuiyan, Mohammad Shavezipur

Proc. ASME. IDETC-CIE2020, Volume 1: 14th International Conference on Micro- and Nanosystems (MNS), V001T01A011, August 17–19, 2020

Paper No: DETC2020-22497

DOI: https://doi.org/10.1115/DETC2020-22497

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Topics: Pressure sensors, Sensors, Design, Pressure, Capacitance, Membranes, Dimensions, Engineering simulation, Etching, Finite element analysis

Proceedings Papers

System for In Vivo Nanoinjection of Tissues

Talmage H. Jones, Brian D. Jensen

Proc. ASME. IDETC-CIE2016, Volume 4: 21st Design for Manufacturing and the Life Cycle Conference; 10th International Conference on Micro- and Nanosystems, V004T08A002, August 21–24, 2016

Paper No: DETC2016-60033

DOI: https://doi.org/10.1115/DETC2016-60033

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Topics: Biological tissues, Design, Additive manufacturing, Etching, Microscale devices, Shapes, Silicon, Testing

Proceedings Papers

A Novel and Simple Electrochemical Glucose Biosensor Based on a Silicon Nanowire Array Electrode

Che-Wei Hsu, Wen-Chao Feng, Kang J. Chang, Gou-Jen Wang

Proc. ASME. IDETC-CIE2014, Volume 4: 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- and Nanosystems, V004T09A003, August 17–20, 2014

Paper No: DETC2014-34843

DOI: https://doi.org/10.1115/DETC2014-34843

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Topics: Biosensors, Electrodes, Glucose, Nanowires, Silicon, Currents, Etching, Glucose sensing, Manufacturing, Metals

Proceedings Papers

Clustered Cell Parallelization for GPU Computing of Silicon Anisotropic Etching Simulation

Jianhua Li, Jingyuan Chen, Yan Wang, Jianhua Huang

Proc. ASME. IDETC-CIE2013, Volume 2A: 33rd Computers and Information in Engineering Conference, V02AT02A013, August 4–7, 2013

Paper No: DETC2013-12965

DOI: https://doi.org/10.1115/DETC2013-12965

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Topics: Anisotropy, Etching, Graphics processing units, Silicon, Simulation, Atoms, Computation, Computer programming, Crystals, Process simulation

Proceedings Papers

High Aspect Ratio Au/Ni Coaxial Nanorod Arrays for Biosensing Applications

Che-Wei Hsu, Gou-Jen Wang

Proc. ASME. IDETC-CIE2013, Volume 1: 15th International Conference on Advanced Vehicle Technologies; 10th International Conference on Design Education; 7th International Conference on Micro- and Nanosystems, V001T09A003, August 4–7, 2013

Paper No: DETC2013-12869

DOI: https://doi.org/10.1115/DETC2013-12869

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Topics: Nanorods, Nickel, Biosensors, Glucose sensing, Manufacturing, Coating processes, Coatings, Electrodeposition, Electrodes, Etching

Proceedings Papers

Effects of Added Mass on Lead-Zirconate-Titanate (PZT) Thin-Film Microactuators in Aqueous Environments

Chuan Luo, Chen-Wei Yang, G. Z. Cao, I. Y. Shen

Paper No: DETC2013-12043

DOI: https://doi.org/10.1115/DETC2013-12043

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Topics: Microactuators, Thin films, Diaphragms (Mechanical devices), Diaphragms (Structural), Silicon, Probes, Water, Dimensions, Electrodes, Actuators

Proceedings Papers

Nanomolding of Nanostructured Biodegradable Tissue Engineering Scaffolds

I-Cheng Chung, Ching-Wen Li, Gou-Jen Wang

Paper No: DETC2013-12175

DOI: https://doi.org/10.1115/DETC2013-12175

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Topics: Biodegradation, Tissue scaffolds, Aluminum, Casting, Durability, Electroforming, Embossing, Etching, Fingerprints, Manufacturing

Proceedings Papers

Modeling, Fabrication, and Testing of a Nanoinjection Lance Array for Simultaneous Multi-Cell Injections

Nathan C. Toone, Gregory H. Teichert, Steven J. Brewer, Brian D. Jensen

Proc. ASME. IDETC-CIE2012, Volume 5: 6th International Conference on Micro- and Nanosystems; 17th Design for Manufacturing and the Life Cycle Conference, 25-32, August 12–15, 2012

Paper No: DETC2012-70471

DOI: https://doi.org/10.1115/DETC2012-70471

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Topics: Anisotropy, Cancer, Computers, Design, Electrophoresis, Etching, Manufacturing, Modeling, Particulate matter, Testing

Proceedings Papers

Effects of Air on Enclosure Design of Lead-Zirconate-Titanate (PZT) Thin-Film Diaphragm Microactuators

Chuan Luo, Kai-Yi Hsiao, Perry Cheung, Howard Lin, A. Q. Shen, G. Z. Cao, I. Y. Shen

Proc. ASME. IDETC-CIE2012, Volume 5: 6th International Conference on Micro- and Nanosystems; 17th Design for Manufacturing and the Life Cycle Conference, 41-47, August 12–15, 2012

Paper No: DETC2012-70061

DOI: https://doi.org/10.1115/DETC2012-70061

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Topics: Design, Diaphragms (Mechanical devices), Diaphragms (Structural), Microactuators, Thin films, Cavities, Silicon, Stiffness, Electrodes, Springs

Proceedings Papers

GPU-Based Parallel Simulation of Silicon Anisotropic Etching

Jianhua Li, Yan Wang, Jingyuan Chen, Li Yan

Proc. ASME. IDETC-CIE2012, Volume 2: 32nd Computers and Information in Engineering Conference, Parts A and B, 819-829, August 12–15, 2012

Paper No: DETC2012-71267

DOI: https://doi.org/10.1115/DETC2012-71267

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Topics: Anisotropy, Etching, Graphics processing units, Silicon, Simulation, Algorithms, Computer programming, Crystals, Thread

Proceedings Papers

Facets and Fissures of a Fractured SOI Wafer

Quentin Aten

Proc. ASME. IDETC-CIE2009, Volume 6: ASME Power Transmission and Gearing Conference; 3rd International Conference on Micro- and Nanosystems; 11th International Conference on Advanced Vehicle and Tire Technologies, 753, August 30–September 2, 2009

Paper No: DETC2009-87584

DOI: https://doi.org/10.1115/DETC2009-87584

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Topics: Semiconductor wafers, Silicon-on-insulator, Silicon, Electron microscopy, Etching

Proceedings Papers

Temple of Zeus: A Micro Replica

Aditya N. Das, Rakesh Murthy

Paper No: DETC2009-87523

DOI: https://doi.org/10.1115/DETC2009-87523

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Topics: Epoxy adhesives, Etching, Lenses (Optics), Light sources, Microassembling, Microelectromechanical systems, Needles, Photolithography, Robots, Sapphire

Proceedings Papers

Enabling Soft Lithography Using an Atomic Force Microscope

Matthew S. Johannes, Daniel G. Cole, Robert L. Clark

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 749-757, August 3–6, 2008

Paper No: DETC2008-49877

DOI: https://doi.org/10.1115/DETC2008-49877

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Topics: Atomic force microscopy, Lithography, Nanoscale phenomena, Anisotropy, Design, Etching, Molding, Nanolithography, Nanostructures , Silicon

Proceedings Papers

Topology Optimization of Micromachined Structures With the Manufacturing Constraints of KOH Etching of (110) Silicon

Sudarshan Hegde, G. K. Ananthasuresh

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 895-903, August 3–6, 2008

Paper No: DETC2008-49617

DOI: https://doi.org/10.1115/DETC2008-49617

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Topics: Etching, Manufacturing, Micromachining, Optimization, Silicon, Topology, Semiconductor wafers, Chemical etching, Design, Lithographic masks

Proceedings Papers

Piezoelectric T-Beam Microactuators

Hareesh K. R. Kommepalli, Andrew D. Hirsh, Christopher D. Rahn, Srinivas A. Tadigadapa

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 909-914, August 3–6, 2008

Paper No: DETC2008-49886

DOI: https://doi.org/10.1115/DETC2008-49886

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Topics: Actuators, Displacement, Electrodes, Etching, Flanges, Geometry, Manufacturing, Microactuators, Microelectromechanical systems, Reactive-ion etching

NARROW

Minkowski Sums: A Simulation Tool for CAD/CAM

Etch Rate Modeling in MEMS Design

Design Considerations for Manufacturability of MEMS Comb Actuators

Design of MEMS via Efficient Simulation of Fabrication

Evolutionary Techniques in MEMS Synthesis

Improving Linearity of Circular Capacitive Pressure Sensor by Using a Dimple Mask

System for In Vivo Nanoinjection of Tissues

A Novel and Simple Electrochemical Glucose Biosensor Based on a Silicon Nanowire Array Electrode

Clustered Cell Parallelization for GPU Computing of Silicon Anisotropic Etching Simulation

High Aspect Ratio Au/Ni Coaxial Nanorod Arrays for Biosensing Applications

Effects of Added Mass on Lead-Zirconate-Titanate (PZT) Thin-Film Microactuators in Aqueous Environments

Nanomolding of Nanostructured Biodegradable Tissue Engineering Scaffolds

Modeling, Fabrication, and Testing of a Nanoinjection Lance Array for Simultaneous Multi-Cell Injections

Effects of Air on Enclosure Design of Lead-Zirconate-Titanate (PZT) Thin-Film Diaphragm Microactuators

GPU-Based Parallel Simulation of Silicon Anisotropic Etching

Facets and Fissures of a Fractured SOI Wafer

Temple of Zeus: A Micro Replica

Enabling Soft Lithography Using an Atomic Force Microscope

Topology Optimization of Micromachined Structures With the Manufacturing Constraints of KOH Etching of (110) Silicon

Piezoelectric T-Beam Microactuators

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