This paper studies the fabrication and calibration of thin film temperature sensors embedded in metal structures. Thin film thermocouples have been successfully fabricated on various metal substrates and advanced embedding techniques have been developed to ensure sensor function inside metal structures. Thin film thermocouple was insulated with multiple thin film layers (Al2O3 and Si3N4) by e-beam evaporating and plasma enhanced chemical vapor deposition (PECVD). The sensors are calibrated. These embedded thin film sensors provide superior spatial and temporal resolution that is not possible with traditional sensors used in various manufacturing processes. This research is significant in a way that it provides a new and improved route for in-situ monitoring of manufacturing process.
Micro Thin Film Temperature Sensors Embedded in Metal Structures
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Choi, H, Datta, A, & Li, X. "Micro Thin Film Temperature Sensors Embedded in Metal Structures." Proceedings of the ASME 2004 International Mechanical Engineering Congress and Exposition. Microelectromechanical Systems. Anaheim, California, USA. November 13–19, 2004. pp. 21-24. ASME. https://doi.org/10.1115/IMECE2004-61398
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