This paper describes the fabrication and actuation of bio-mimetic cilia for fluid manipulation. High aspect ratio cilia made of polydimethylsiloxane (PDMS) were successfully assembled in a microfluidic device by our novel fabrication method. This method was to release the PDMS cilia from a Si mold and assemble the cilia in a device. All the process was performed under water in order to avoid the stiction and pairing of the PDMS cilia. The underwater assembly method enabled a high aspect ratio PDMS structure assembly in a fluidic device. The PDMS cilia were actuated in air and water by lead-zirconate-titanate (PZT) microstage. In the fabricated device, the maximum displacement of the cilia was observed at 120Hz in air and at 50Hz in de-ionized (DI) water with our experimental condition. The actuated cilia in a solution produced convective and propulsive fluid flow near the cilia structure. The developed device can be used for precise handling of small volume sample (e.g., 1 μL).

This content is only available via PDF.
You do not currently have access to this content.