Abstract

This paper reports the fabrication and testing of a silicon micromachined resonator suitable for vacuum sensing applications. The device consist of a circular bossed 1 mm-diameter, 5 μm-thick p++ silicon plate anodically bonded to a 7740 Pyrex glass wafer. The device is fabricated with 4 lithographic steps using the dissolved silicon wafer process. Both the resonator natural frequency and its quality factor are functions of gas pressure in the 101 – 10−4 Torr range.

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