A finite element model has been developed using MEMCAD4.0 for the AFIT electrothermally actuated piston micromirror fabricated in the MCNC MUMPs 17 run. The model is used to quantify the residual stress in the mirror metal reflector and to simulate the mirror deflection and curvature both in vacuum and in nitrogen ambient. The numerical results are in good agreement with the measured values. The model is also used to predict the effect of the residual stress in the mirror supporting legs on the mirror deflection.

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