This study presents a methodology for uniaxial tension testing of both micron and sub-micron scale specimens using MEMS devices. The methodology allows free standing, single or multi-layered specimens to be fabricated separately from the MEMS device. The MEMS device is a comb drive actuator which can be calibrated for force measurement. Materials behavior can be observed in-situ in analytical chambers such as SEM and TEM and under different environmental conditions. The methodology is demonstrated with the testing of a free standing polymer and an Aluminum specimen with thickness 1.3 microns and 110 nanometers respectively. Significant deviation in materials behavior is observed between bulk and micro-scale.

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