In the paper, a theoretical investigation was presented, which is used to explain the effect of pulse-reverse current on uniformity in micro-electroforming. And micro-electroforming experiments of two different pulse-reverse currents with gaps in positive direction were carried out correspondingly. The mold inserts used in micro fluidic-chip were micro-electroformed in these experiments, and its feature width is 90um. No backing process was adopted, which mainly consisted of three procedures. Two different pulse-reverse currents used in these experiments were pulse-reverse current with gaps in both positive and negative direction, and pulse-reverse current with gaps only in positive direction, respectively. The fundamental parameters of these experiments were summarized from lots of micro-electroforming experiments of pulse current. After experiments, comparisons were carried out between the results of pulse-reverse current experiments and pulse current experiment. Because negative current could erode the tips on electroforming surface, better uniformity was obtained in these experiments using pulse-reverse currents. The experimental results were consistent with the theoretical investigation.
- Nanotechnology Institute
Study on the Uniformity of Micro Electroforming Mold Insert Used in Micro Fluidic-Chip Fabrication
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Du, L, Liu, H, Liu, C, Zhu, S, & Qin, J. "Study on the Uniformity of Micro Electroforming Mold Insert Used in Micro Fluidic-Chip Fabrication." Proceedings of the 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems. First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B. Sanya, Hainan, China. January 10–13, 2007. pp. 329-334. ASME. https://doi.org/10.1115/MNC2007-21100
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