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Keywords: nanopositioning
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Journal Articles
Publisher: ASME
Article Type: Dynamic Modeling Control And Manipulation At The Nanoscale
J. Dyn. Sys., Meas., Control. November 2009, 131(6): 061101.
Published Online: October 28, 2009
...Garrett M. Clayton; Szuchi Tien; Kam K. Leang; Qingze Zou; Santosh Devasia Control can enable high-bandwidth nanopositioning needed to increase the operating speed of scanning probe microscopes (SPMs). High-speed SPMs can substantially impact the throughput of a wide range of emerging nanosciences...
Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Dyn. Sys., Meas., Control. July 2008, 130(4): 041007.
Published Online: June 9, 2008
...Jingyan Dong; Srinivasa M. Salapaka; Placid M. Ferreira This paper presents the design, model identification, and control of a parallel-kinematic X Y Z nanopositioning stage for general nanomanipulation and nanomanufacturing applications. The stage has a low degree-of-freedom monolithic parallel...
Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Dyn. Sys., Meas., Control. May 2008, 130(3): 031008.
Published Online: April 25, 2008
.... The controller is experimentally implemented on a three-dimensional nanopositioning stage for surface topography tracking, a problem typically encountered in scanning probe microscopy applications. After hitting an internal turning point, its associated minor hysteresis loop is no longer useful...
Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. September 2005, 127(3): 433–442.
Published Online: August 24, 2004
... bandwidth should be made for nanopositioning. Experimental results including a 250 μ m step response, sinusoidal and square-wave trajectories, and spherical motion generation demonstrated the three-dimensional (3D) nanoscale motion-control capability of this minimum-actuator magnetic levitator. Potential...