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Keywords: actuators
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Journal Articles
Article Type: Technical Papers
J. Electron. Packag. December 2003, 125(4): 527–530.
Published Online: December 15, 2003
...M. Carmona; S. Marco; J. Samitier; M. C. Acero; J. A. Plaza; J. Esteve The analysis of a thermo-pneumatic actuation unit for its use in a micropump has been carried out. Coupled thermo-mechanical simulations by finite element method (FEM) (with ANSYS software) were required because...