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Keywords: pneumatic systems
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Journal Articles
Article Type: Technical Papers
J. Electron. Packag. December 2003, 125(4): 527–530.
Published Online: December 15, 2003
... OF ELECTRONIC PACKAGING . Manuscript received November 2002. Associate Editor: L. Ernst. 01 November 2002 15 12 2003 actuators pneumatic systems micropumps finite element analysis Microsystems are usually complex devices, including multiple components from different physical...