A set of self-consistent conservation equations for the charged particle densities and the temperatures in a weakly ionized plasma between two dissimilar electrodes is numerically solved using an orthogonal body-fitted coordinate system. The electron number density and temperature variation in the discharge gap, and the results for the heat transfer to the anode are presented. Results have been developed for a configuration that commonly arises in microelectronic manufacturing—a thin cylindrical anode together with a planar cathode.
TECHNICAL NOTE: Weakly Ionized Plasma Arc Heat Transfer Between Geometrically Dissimilar Electrodes
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Sripada, S. S., Ayyaswamy, P. S., and Cohen, I. M. (November 1, 1998). "TECHNICAL NOTE: Weakly Ionized Plasma Arc Heat Transfer Between Geometrically Dissimilar Electrodes." ASME. J. Heat Transfer. November 1998; 120(4): 939–942. https://doi.org/10.1115/1.2825913
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