A set of self-consistent conservation equations for the charged particle densities and the temperatures in a weakly ionized plasma between two dissimilar electrodes is numerically solved using an orthogonal body-fitted coordinate system. The electron number density and temperature variation in the discharge gap, and the results for the heat transfer to the anode are presented. Results have been developed for a configuration that commonly arises in microelectronic manufacturing—a thin cylindrical anode together with a planar cathode.

Issue Section:
Featured Section—Heat Transfer in Manufacturing
Keywords:
Heat Transfer, Melting, Phase Change, Plasma, Solidification
Topics:
Electric arcs, Electrodes, Heat transfer, Plasmas (Ionized gases)
1.
Ayyaswamy, P. S., Sripada, S. S., and Cohen, I. M., 1998, “Interfacial motion of a molten layer subject to plasma heating,” Fluid Dynamics at Interfaces, W. Shyy, Cambridge University Press, New York, in press.
2.
Eca
L.
,
1996
, “
2D orthogonal grid generation with boundary point distribution control
,”
J. Comp. Phys.
, Vol.
125
, pp.
440
–
453
.
3.
Hinnov
E.
, and
Hirschberg
J. G.
,
1962
, “
Electron-ion Recombination in Dense Plasmas
,”
Phys. Rev.
, Vol.
125
, No.
3
, pp.
795
–
801
.
4.
Jog
M. A.
,
Cohen
I. M.
, and
Ayyaswamy
P. S.
,
1991
, “
Breakdown of a Wire-to-plane Discharge
,”
Phys. Fluids B
, Vol.
3
, pp.
3532
–
3536
.
5.
Jog
M. A.
,
Cohen
I. M.
, and
Ayyaswamy
P. S.
,
1992
, “
Electrode Heating in a Wire-to-plane Arc
,”
Phys. Fluids B
, Vol.
4
, pp.
465
–
472
.
6.
Knupp, P., and Steinberg, S., 1993, Fundamentals of Grid Generation, CRC Press, Boca Raton, FL.
7.
Mitchner, M., and Kruger, Jr., C. H., 1973, Partially Ionized Gases, John Wiley and Sons, New York.
8.
Patankar, S. V., 1980, Numerical Heat Transfer and Fluid Flow, Hemisphere, Washington, DC.
9.
Qin, W., 1997, “Numerical and Experimental Studies of Heat Transfer Phenomena in Microelectronic Packaging,” Ph.D. thesis, University of Pennsylvania, Philadelphia, PA.
10.
Ryskin
G.
, and
Leal
L. G.
,
1983
, “
Orthogonal Mapping
,”
J. Comp. Phys.
, Vol.
50
, pp.
71
–
100
.
11.
von Engel, A., 1965, Ionized Gases, 2nd Ed., Oxford University Press, London.
12.
Wiedmann
M. L.
, and
Trumpler
P. R.
,
1946
, “
Thermal Accommodation Coefficients
,”
Trans. ASME
, Vol.
68
, pp.
57
–
64
.
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