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Keywords: chemical vapor deposition
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Journal Articles
Article Type: Research-Article
J. Heat Transfer. October 2021, 143(10): 102201.
Paper No: HT-21-1107
Published Online: September 8, 2021
...Omar Dhannoon Jumaah; Yogesh Jaluria Chemical vapor deposition (CVD) is a widely used manufacturing process for obtaining thin films of materials like silicon, silicon carbide, graphene, and gallium nitride that are employed in the fabrication of electronic and optical devices. Gallium nitride (GaN...
Journal Articles
Article Type: Research Papers
J. Heat Transfer. August 2011, 133(8): 082501.
Published Online: May 4, 2011
...Nasir Memon; Yogesh Jaluria An experimental study is undertaken to investigate the flow structure and heat transfer in a stagnation flow chemical vapor deposition (CVD) reactor at atmospheric pressure. It is critical to develop models that predict flow patterns in such a reactor to achieve uniform...
Journal Articles
Journal Articles