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Keywords: confocal chromatic probe
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Proceedings Papers

Proc. ASME. LEMP2020, JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, V001T08A011, September 3, 2020
Publisher: American Society of Mechanical Engineers
Paper No: LEMP2020-8564
... is used to correct the surface of the workpiece to reduce the effect of waviness in advance. The OMM system consists of a displacement probe and a machine tool axis position capture device. The probe system uses a confocal chromatic probe on an ultra-precision machine tool to evaluate the form deviation...