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Keywords: thin film
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Proceedings Papers

Proc. ASME. LEMP2020, JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, V001T08A009, September 3, 2020
Publisher: American Society of Mechanical Engineers
Paper No: LEMP2020-8546
... Abstract This present paper describes some test results about fabrication of micro/nano-structure for MEMS using printing techniques of metal and nanoparticle thin films. Transfer-printing of a bi-layered film of graphene oxide (GO) and Au is processed on a PET substrate. Nano-particles of GO...