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Keywords: ultraprecision machine tool
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Proceedings Papers

Proc. ASME. LEMP2020, JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, V001T08A011, September 3, 2020
Publisher: American Society of Mechanical Engineers
Paper No: LEMP2020-8564
...) workpiece with feed-forward correction, we were able to reduce the profile error from 125.3 nm to 42.1 nm in p-v (peak to valley) and eventually also reduced the waviness. on-machine measurement ultraprecision machine tool confocal chromatic probe ON-MACHINE METROLOGY SYSTEM USING CONFOCAL...