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Four instances studied in Case II: ( a ) Real part studied in Case-IIA, ( b...
Published Online: March 21, 2023
Fig. 4 Four instances studied in Case II: ( a ) Real part studied in Case-IIA, ( b ) the part studied in Case-IIB, ( c ) the part studied in Case-IIC, ( d ) the part studied in Case-IID More
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The PCMP experimental device of diamond: ( a ) main view, ( b ) UV lamp, ( ...
Published Online: March 21, 2023
Fig. 1 The PCMP experimental device of diamond: ( a ) main view, ( b ) UV lamp, ( c ) processing view, and ( d ) schematic diagram of PCMP More
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The surface morphology and MRR of diamond after machining: ( a ) the 2D sur...
Published Online: March 21, 2023
Fig. 3 The surface morphology and MRR of diamond after machining: ( a ) the 2D surface morphology obtained via Zygo after CMP with a measurement range of 868 μ m × 868 μ m, ( b ) the 2D surface morphology obtained via Zygo after PCMP with a measurement range of 868 μ m × 868 μ m, ( c ) the rou... More
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AFM morphology of diamond after PCMP: Ra = 0.071 nm, RMS = 0.090 nm, Rz = 0...
Published Online: March 21, 2023
Fig. 4 AFM morphology of diamond after PCMP: Ra = 0.071 nm, RMS = 0.090 nm, Rz = 0.943 nm with a measurement range of 1.5 μ m × 1.5 μ m: ( a ) 2D morphology and ( b ) 3D morphology More
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XPS spectra of C1s of diamond under different etching depths: ( a ) etching...
Published Online: March 21, 2023
Fig. 5 XPS spectra of C1s of diamond under different etching depths: ( a ) etching depths = 0, ( b ) etching depths = 0.5 nm, and ( c ) etching depths = 1 nm More
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Variations of internal energy in the diamond substrate before and after UV ...
Published Online: March 21, 2023
Fig. 7 Variations of internal energy in the diamond substrate before and after UV irradiation: ( a ) potential energy of carbon atoms and ( b ) bond energy of C-C bonds More
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