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Journal Articles

Three-Dimensional Profile Reconstruction and Internal Defect Detection of Silicon Wafers Using Cascaded Fiber Optic Fabry–Pérot Interferometer and Leaky Field Detection Technologies

Fengfeng Zhou, Xingyu Fu, Siying Chen, Changheon Han, Martin B. G. Jun
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. July 2024, 146(7): 070907.
Paper No: MANU-23-1611
https://doi.org/10.1115/1.4065523
Published Online: June 3, 2024
View Article titled, Three-Dimensional Profile Reconstruction and Internal Defect Detection of Silicon Wafers Using Cascaded Fiber Optic Fabry–Pérot Interferometer and Leaky Field Detection Technologies
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Topics: Fibers, Flaw detection, Interferometers, Semiconductor wafers, Leakage, Optical fiber, Refractive index, Wavelength
Journal Articles

Machine Straightness Error Measurement Based on Optical Fiber Fabry–Pérot Interferometer Monitoring Technique

Xingyu Fu, Fengfeng Zhou, Huitaek Yun, Eunseob Kim, Siying Chen, Martin Byung-Guk Jun
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. January 2023, 145(1): 011007.
Paper No: MANU-22-1325
https://doi.org/10.1115/1.4055897
Published Online: October 18, 2022
View Article titled, Machine Straightness Error Measurement Based on Optical Fiber Fabry–Pérot Interferometer Monitoring Technique
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Topics: Errors, Interferometers, Machinery, Optical fiber, Sensors, Fibers
Journal Articles

Scanning Grating Microinterferometer for MEMS Metrology

Byungki Kim, Graduate Research Assistant, Michael C. Schmittdiel, Graduate Research Assistant, F. Levent Degertekin, Assistant Professor, Thomas R. Kurfess, Professor
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. November 2004, 126(4): 807–812.
https://doi.org/10.1115/1.1812773
Published Online: February 4, 2005
View Article titled, Scanning Grating Microinterferometer for MEMS Metrology
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Topics: Diffraction gratings, Interferometers, Manufacturing, Metrology, Microelectromechanical systems, Vibration, Resolution (Optics), Sensors
Journal Articles

Development of a Grating Interferometer with Application to HDD Servo-Track Writing

Harry D. Garner, Kok-Meng Lee, Lin Guo
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. August 2001, 123(3): 445–452.
https://doi.org/10.1115/1.1360694
Published Online: April 1, 2000
View Article titled, Development of a Grating Interferometer with Application to HDD Servo-Track Writing
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Topics: Diffraction gratings, Diffraction patterns, Horizontal directional drilling, Interferometers, Displacement, Actuators, Sensors, Design
Journal Articles

A Fiber Optic Sensor for Surface Roughness Measurement

C. Bradley, J. Bohlmann, S. Kurada
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. May 1998, 120(2): 359–367.
https://doi.org/10.1115/1.2830135
Published Online: May 1, 1998
View Article titled, A Fiber Optic Sensor for Surface Roughness Measurement
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Topics: Cavities, Data acquisition systems, Fiber optic sensors, Fibers, Interferometers, Lenses (Optics), Phase transitions, Signals, Surface roughness
Journal Articles

Assessment of Tool Wear in Milling Using Acoustic Emission Detected by a Fiber-Optic Interferometer

T. A. Carolan, D. P. Hand, J. S. Barton, J. D. C. Jones, P. Wilkinson, R. L. Reuben
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. August 1996, 118(3): 428–433.
https://doi.org/10.1115/1.2831048
Published Online: August 1, 1996
View Article titled, Assessment of Tool Wear in Milling Using Acoustic Emission Detected by a Fiber-Optic Interferometer
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Topics: Acoustic emissions, Fibers, Interferometers, Milling, Wear, Calibration, Cutting tools, Displacement, Frequency response, Piezoelectric transducers
Journal Articles

A Stochastic Approach to the Measurement and Analysis of Leadscrew Drive Kinematic Errors

Hong Zan Bin, K. Yamazaki, M. F. DeVries
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. November 1984, 106(4): 339–344.
https://doi.org/10.1115/1.3185956
Published Online: November 1, 1984
View Article titled, A Stochastic Approach to the Measurement and Analysis of Leadscrew Drive Kinematic Errors
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Topics: Errors, Kinematics, Machine tools, Calibration, Computers, Displacement, Emission spectroscopy, Interferometers, Lasers, Position control