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Journal Articles

Precision Silicon Exfoliation Tool Design

Martin J. Ward, Dipankar Behera, Michael A. Cullinan

J. Manuf. Sci. Eng. February 2023, 145(2): 024501.

Paper No: MANU-22-1105

DOI: https://doi.org/10.1115/1.4055320

Published Online: September 27, 2022

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Topics: Design, Metrology, Semiconductor wafers, Silicon, Stress, Surface roughness, Errors, Nickel, Film thickness, Engineering prototypes

Journal Articles

Study on the Vertical Ultrasonic Vibration-Assisted Nanomachining Process on Single-Crystal Silicon

Jiqiang Wang, Yanquan Geng, Zihan Li, Yongda Yan, Xichun Luo, Pengfei Fan

J. Manuf. Sci. Eng. April 2022, 144(4): 041013.

Paper No: MANU-21-1127

DOI: https://doi.org/10.1115/1.4052356

Published Online: October 19, 2021

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Topics: Crystals, Damage, Machining, Nanochannels, Silicon, Vibration, Stress

Journal Articles

Sustainable Fabrication of Glass Nanostructures Using Infrared Transparent Mold Assisted by CO 2 Laser Scanning Irradiation

Mohd Zairulnizam Bin Mohd Zawawi, Taekyung Kim, Myungki Jung, Jaehun Im, Shinill Kang

J. Manuf. Sci. Eng. December 2018, 140(12): 121005.

Paper No: MANU-18-1268

DOI: https://doi.org/10.1115/1.4041181

Published Online: September 21, 2018

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Topics: Carbon dioxide lasers, Glass, Silicon, Irradiation (Radiation exposure), Manufacturing, Lasers

Journal Articles

Performance of Diamond and Silicon Carbide Wheels on Grinding of Bioceramic Material Under Minimum Quantity Lubrication Condition

P. Suya Prem Anand, N. Arunachalam, L. Vijayaraghavan

J. Manuf. Sci. Eng. December 2017, 139(12): 121019.

Paper No: MANU-17-1235

DOI: https://doi.org/10.1115/1.4037940

Published Online: November 2, 2017

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Topics: Diamonds, Grinding, Grinding wheels, Wheels, Silicon, Fluids, Lubrication

Journal Articles

A Molecular Dynamics Simulation Study of Material Removal Mechanisms in Vibration Assisted Nano Impact-Machining by Loose Abrasives

Sagil James, Murali Sundaram

J. Manuf. Sci. Eng. August 2017, 139(8): 081014.

Paper No: MANU-16-1452

DOI: https://doi.org/10.1115/1.4036559

Published Online: May 11, 2017

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Topics: Abrasives, Borosilicate glasses, Heat resistant glass, Kinetic energy, Machining, Nanoparticles, Nanoscale phenomena, Silicon, Simulation, Vibration

Journal Articles

Residual Stress Distribution in Silicon Wafers Machined by Rotational Grinding

Ping Zhou, Ying Yan, Ning Huang, Ziguang Wang, Renke Kang, Dongming Guo

J. Manuf. Sci. Eng. August 2017, 139(8): 081012.

Paper No: MANU-16-1608

DOI: https://doi.org/10.1115/1.4036125

Published Online: May 10, 2017

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Topics: Deformation, Diamonds, Grinding, Semiconductor wafers, Stress, Wheels, Stress concentration, Damage, Silicon

Journal Articles

Tool Load Sensitivity Against Multidimensional Process Influences in Microblanking of Copper Foils With Silicon Punches

Sven Hildering, Markus Michalski, Ulf Engel, Marion Merklein

J. Manuf. Sci. Eng. September 2016, 138(9): 091004.

Paper No: MANU-15-1570

DOI: https://doi.org/10.1115/1.4033522

Published Online: June 20, 2016

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Topics: Copper foil, Cutting, Errors, Finite element model, Silicon, Stress, Tension, Wear, Fracture (Materials), Blanking (Metalworking)

Journal Articles

Deposition of a Silicon Carbide Reinforced Metal Matrix Composite (P25) Layer Using CO 2 Laser

Mum Wai Yip, Stuart Barnes, Ahmed Aly Diaa Mohmmed Sarhan

J. Manuf. Sci. Eng. June 2015, 137(3): 031010.

Paper No: MANU-14-1349

DOI: https://doi.org/10.1115/1.4029831

Published Online: June 1, 2015

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Topics: Iron, Lasers, Particulate matter, Porosity, Carbon dioxide lasers, Microhardness, Silicon

Journal Articles

Modeling of Material Removal Rate in Vibration Assisted Nano Impact-Machining by Loose Abrasives

Sagil James, Murali M. Sundaram

J. Manuf. Sci. Eng. April 2015, 137(2): 021008.

Paper No: MANU-14-1284

DOI: https://doi.org/10.1115/1.4028199

Published Online: April 1, 2015

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Topics: Abrasives, Machining, Modeling, Vibration, Particulate matter, Silicon, Borosilicate glasses, Heat resistant glass, Brittleness, Atomic force microscopy

Journal Articles

A Theoretical Assessment of Surface Defect Machining and Hot Machining of Nanocrystalline Silicon Carbide

Saurav Goel, Waleed Bin Rashid, Xichun Luo, Anupam Agrawal, V. K. Jain

J. Manuf. Sci. Eng. April 2014, 136(2): 021015.

Paper No: MANU-12-1239

DOI: https://doi.org/10.1115/1.4026297

Published Online: February 10, 2014

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Topics: Cutting, Machining, Molecular dynamics simulation, Silicon, Stress, Cutting tools, Temperature

Journal Articles

Ablation Dynamics of Silicon by Femtosecond Laser and the Role of Early Plasma

X. Zhao, Y. C. Shin

J. Manuf. Sci. Eng. December 2013, 135(6): 061015.

Paper No: MANU-13-1193

DOI: https://doi.org/10.1115/1.4025805

Published Online: November 18, 2013

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Topics: Ablation (Vaporization technology), Dynamics (Mechanics), Electrons, Lasers, Plasmas (Ionized gases), Silicon, Absorption, Fluence (Radiation measurement), Temperature

Journal Articles

Laser Bending of Silicon Sheet: Absorption Factor and Mechanisms

Weixing Xu, L. C. Zhang, Xuyue Wang

J. Manuf. Sci. Eng. December 2013, 135(6): 061005.

Paper No: MANU-13-1128

DOI: https://doi.org/10.1115/1.4025579

Published Online: November 5, 2013

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Topics: Absorption, Lasers, Silicon, Temperature, Laser beams, Thermocouples, Thin films

Journal Articles

Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-Ray Optics

Raul E. Riveros, Hitomi Yamaguchi, Taylor Boggs, Ikuyuki Mitsuishi, Kazuhisa Mitsuda, Utako Takagi, Yuichiro Ezoe, Kensuke Ishizu, Teppei Moriyama

J. Manuf. Sci. Eng. October 2012, 134(5): 051001.

DOI: https://doi.org/10.1115/1.4006967

Published Online: August 20, 2012

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Topics: Annealing, Finishing, Hydrogen, Microelectromechanical systems, Mirrors, Optics, Silicon, Surface roughness, X-ray optics, X-rays

Journal Articles

Femtosecond Laser-Induced Simultaneous Surface Texturing and Crystallization of a-Si:H Thin Film: Absorption and Crystallinity

Hongliang Wang, Panjawat Kongsuwan, Gen Satoh, Y. Lawrence Yao

J. Manuf. Sci. Eng. June 2012, 134(3): 031006.

DOI: https://doi.org/10.1115/1.4006548

Published Online: May 7, 2012

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Topics: Absorption, Crystallization, Lasers, Water, Spectra (Spectroscopy), Thin films, Silicon

Journal Articles

Time-Resolved Experimental Study of Silicon Carbide Ablation by Infrared Nanosecond Laser Pulses

Yibo Gao, Yun Zhou, Benxin Wu, Sha Tao, Ronald L. Jacobsen, Bill Goodman

J. Manuf. Sci. Eng. April 2011, 133(2): 021006.

DOI: https://doi.org/10.1115/1.4003618

Published Online: March 11, 2011

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Topics: Ablation (Vaporization technology), Laser ablation, Lasers, Silicon, Plasmas (Ionized gases), Micromachining

Journal Articles

Integrated Two-Photon Polymerization With Nanoimprinting for Direct Digital Nanomanufacturing

Wande Zhang, Li-Hsin Han, Shaochen Chen

J. Manuf. Sci. Eng. June 2010, 132(3): 030907.

DOI: https://doi.org/10.1115/1.4001661

Published Online: May 26, 2010

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Topics: Glass, Lasers, Manufacturing, Nanomanufacturing, Photons, Polymerization, Polymers, Nanostructures , Silicon, Wavelength

Journal Articles

Development of Plasma Nanomanufacturing Workcell

King Wai Chiu Lai, Jeffri J. Narendra, Ning Xi, Jiangbo Zhang, Timothy A. Grotjohn, Jes Asmussen

J. Manuf. Sci. Eng. June 2010, 132(3): 031003.

DOI: https://doi.org/10.1115/1.4001719

Published Online: April 29, 2010

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Topics: Atomic force microscopy, Etching, Nanomanufacturing, Plasmas (Ionized gases), Probes, Silicon, Photoresists, Diamonds

Journal Articles

Parametric Modeling and Optimization of Chemical Vapor Deposition Process

Po Ting Lin, Yogesh Jaluria, Hae Chang Gea

J. Manuf. Sci. Eng. February 2009, 131(1): 011011.

DOI: https://doi.org/10.1115/1.3063689

Published Online: January 15, 2009

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Topics: Chemical vapor deposition, Modeling, Optimization, Simulation, Temperature, Silicon, Thin films

Journal Articles

Plastic Deformation in Silicon Crystal Induced by Heat-Assisted Laser Shock Peening

Gary J. Cheng, M. Cai, Daniel Pirzada, Maxime J.-F. Guinel, M. Grant Norton

J. Manuf. Sci. Eng. February 2008, 130(1): 011008.

DOI: https://doi.org/10.1115/1.2815343

Published Online: February 6, 2008

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Topics: Deformation, Dislocations, Heat, Laser hardening, Silicon, Silicon crystals, Stress, Shock (Mechanics), Lasers

Journal Articles

Response of Thin Films and Substrate to Micro-Scale Laser Shock Peening

Youneng Wang, Hongqiang Chen, Jeffrey W. Kysar, Y. Lawrence Yao

J. Manuf. Sci. Eng. June 2007, 129(3): 485–496.

DOI: https://doi.org/10.1115/1.2714568

Published Online: November 10, 2006

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Topics: Grain size, Laser hardening, Shock (Mechanics), Silicon, Simulation, Thin films, X-ray diffraction, X-rays, Electron backscatter diffraction, Crystals

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Journal citation

NARROW

Precision Silicon Exfoliation Tool Design

Study on the Vertical Ultrasonic Vibration-Assisted Nanomachining Process on Single-Crystal Silicon

Sustainable Fabrication of Glass Nanostructures Using Infrared Transparent Mold Assisted by CO 2 Laser Scanning Irradiation

Performance of Diamond and Silicon Carbide Wheels on Grinding of Bioceramic Material Under Minimum Quantity Lubrication Condition

A Molecular Dynamics Simulation Study of Material Removal Mechanisms in Vibration Assisted Nano Impact-Machining by Loose Abrasives

Residual Stress Distribution in Silicon Wafers Machined by Rotational Grinding

Tool Load Sensitivity Against Multidimensional Process Influences in Microblanking of Copper Foils With Silicon Punches

Deposition of a Silicon Carbide Reinforced Metal Matrix Composite (P25) Layer Using CO 2 Laser

Modeling of Material Removal Rate in Vibration Assisted Nano Impact-Machining by Loose Abrasives

A Theoretical Assessment of Surface Defect Machining and Hot Machining of Nanocrystalline Silicon Carbide

Ablation Dynamics of Silicon by Femtosecond Laser and the Role of Early Plasma

Laser Bending of Silicon Sheet: Absorption Factor and Mechanisms

Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-Ray Optics

Femtosecond Laser-Induced Simultaneous Surface Texturing and Crystallization of a-Si:H Thin Film: Absorption and Crystallinity

Time-Resolved Experimental Study of Silicon Carbide Ablation by Infrared Nanosecond Laser Pulses

Integrated Two-Photon Polymerization With Nanoimprinting for Direct Digital Nanomanufacturing

Development of Plasma Nanomanufacturing Workcell

Parametric Modeling and Optimization of Chemical Vapor Deposition Process

Plastic Deformation in Silicon Crystal Induced by Heat-Assisted Laser Shock Peening

Response of Thin Films and Substrate to Micro-Scale Laser Shock Peening

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