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Keywords: laser bending
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Journal Articles
Article Type: Research-Article
J. Manuf. Sci. Eng. December 2013, 135(6): 061005.
Paper No: MANU-13-1128
Published Online: November 5, 2013
... , J. , Gartner , E. , and Jansch , E. , 1999 , “ Silicon as a Plastic Material ,” J. Micromech. Microeng. , 9 ( 4 ), pp. 305 – 312 . 10.1088/0960-1317/9/4/304 [4] Exner , H. , and Loschner , U. , 2003 , “ Contactless Laser Bending of Silicon Microstructures ,” Proc. SPIE...
Journal Articles