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Keywords: metal-assisted chemical etching
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Journal Articles
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. November 2023, 145(11): 114501.
Paper No: MANU-23-1284
Published Online: July 21, 2023
... is unclear. This study investigated the effects of bubbles on manufacturing Au dendrites and silicon nanowires through metal-assisted chemical etching. The results of manufacture under three conditions (standard, shaking, and vacuum conditions) were compared. Synchronous growth of Au dendrites and silicon...
Journal Articles
Pee-Yew Lee, Chun-Jen Weng, Hung Ji Huang, Li-Yan Wu, Guo-Hao Lu, Chao-Feng Liu, Cheng-You Chen, Ting-Yu Li, Yung-Sheng Lin
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. September 2023, 145(9): 094501.
Paper No: MANU-23-1086
Published Online: May 9, 2023
...Pee-Yew Lee; Chun-Jen Weng; Hung Ji Huang; Li-Yan Wu; Guo-Hao Lu; Chao-Feng Liu; Cheng-You Chen; Ting-Yu Li; Yung-Sheng Lin Micro/nano-textured Si wafers manufactured using metal-assisted chemical etching (MACE) have been the focus of several studies, but the mechanism of bubble generation during...
