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Keywords: nanomanufacturing
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. February 2022, 144(2): 021011.
Paper No: MANU-21-1316
Published Online: August 5, 2021
... method. We present the modeling approach in Sec. 3 and discuss the predictions of the model in Sec. 4 . Although TPL offers considerable advantages over competing nanomanufacturing techniques, it has traditionally been held back by the need for serial laser scanning through the photoresist...
Journal Articles
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. December 2013, 135(6): 064501.
Paper No: MANU-13-1184
Published Online: November 5, 2013
.... 1 Corresponding author. Manuscript received April 26, 2013; final manuscript received September 21, 2013; published online November 5, 2013. Assoc. Editor: Yung Shin. 26 04 2013 21 09 2013 Nanoimprint lithography (NIL) is a promising nanomanufacturing technology that offers...
Journal Articles