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Keywords: thin film sensors
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Journal Articles
Article Type: Research Papers
J. Manuf. Sci. Eng. December 2008, 130(6): 061010.
Published Online: November 4, 2008
... (e-beam) evaporators. One of the key issues in successfully embedding thin film sensors into metal is the selection of dielectric thin film materials. In addition to electric insulation, dielectric thin film stacks must possess good adhesion and thermomechanical stability to sustain mechanical...
Journal Articles
Article Type: Research Papers
J. Manuf. Sci. Eng. April 2008, 130(2): 021002.
Published Online: March 7, 2008
... laser beam machining micromachining nickel thermocouples thin film sensors Lasers have been widely used in manufacturing, especially for micromachining small components demanded of aerospace, electronics, and microelectromechanical system (MEMS), due to their distinguished process...