This paper presents a new concept flexure hinge for MEMS applications and reveals how to design, construct, and experimentally test. This hinge combines a curved beam, as a flexible element, and a pair of conjugate surfaces, whose contact depends on load conditions. The geometry is conceived in such a way that minimum stress conditions are maintained within the flexible beam. A comparison of the new design with the other kind of revolute and flexible joints is presented. Then, the static behavior of the hinge is analyzed by means of a theoretical approach, based on continuum mechanics, and the results are compared to those obtained by means of finite element analysis (FEA) simulation. A silicon hinge prototype is also presented and the construction process, based on single step lithography and reactive ion etching (RIE) technology, is discussed. Finally, a crucial in–SEM experiment is performed and the experimental results are interpreted through the theoretical models.
MEMS-Based Conjugate Surfaces Flexure Hinge
Contributed by the Mechanisms and Robotics Committee of ASME for publication in the JOURNAL OF MECHANICAL DESIGN. Manuscript received April 16, 2014; final manuscript received October 5, 2014; published online November 14, 2014. Assoc. Editor: Shorya Awtar.
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Verotti, M., Crescenzi, R., Balucani, M., and Belfiore, N. P. (January 1, 2015). "MEMS-Based Conjugate Surfaces Flexure Hinge." ASME. J. Mech. Des. January 2015; 137(1): 012301. https://doi.org/10.1115/1.4028791
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