Boosting Speed and Accuracy in Precision Motion Control

Feedforward (FF) control uses a priori knowledge about a given system and its disturbances to influence the system’s behavior in a pre-defined way. However, unlike feedback (FB) control, it does not adjust the control signal (or manipulated variable) in response to how the system actually reacts. In other words, FF control is proactive while FB control is reactive. Model-inversion-based FF (MIBFF) control is a specific type of FF control where the control variable is determined by inverting a model of the system to be controlled. It is very popular for its use in output tracking control problems, where the goal is to force the system’s output to follow a desired trajectory. Output tracking is critical in several different applications, e.g., in manufacturing, robotics, automotive, aerospace, and is typically achieved using a combination of FF and FB control. As motivating examples, consider MIBFF in ultra-precise wafer scanners used in photolithography (see Sidebar S1) and in desktop 3D printing (see Sidebar S2). As these motivating examples illustrate, non-minimum phase (NMP) zeros often arise in practical engineering applications due to non-collocated sensors and actuators, fast sampling, etc. MIBFF for systems with NMP zeros is arguably the most important (and certainly the most researched) issue related to MIBFF.