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A Schematic illustration of the experimental setup and the mechanism of the...
Published Online: February 1, 2023
Fig. 1 A Schematic illustration of the experimental setup and the mechanism of the E-V AFM nanolithography. ( a ) A schematic view of the E-V AFM setup. ( b ) E-field strength distribution in the polymer layer underneath the AFM tip. ( c ) Height profile of the fabricated nanofeatures correspondin... More
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E-V AFM lithography results with no-vibration (upper three lines) and  xy -...
Published Online: February 1, 2023
Fig. 2 E-V AFM lithography results with no-vibration (upper three lines) and xy -vibration (lower three lines, vibration amplitude = 0.6 VPP) under different tip biases (0.5, 1.2, 2 V from left to right, respectively). ( a )Topography image of the nanopatterns. ( b ) and ( c ) Height profiles of ... More
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E-V AFM lithography results with different  xy -vibration amplitudes (vibra...
Published Online: February 1, 2023
Fig. 3 E-V AFM lithography results with different xy -vibration amplitudes (vibration amplitude = 0, 0.6, and 1.2 VPP) comparison, with the same speed (0.5  μ m/s) and tip bias (2.9 V) applied. ( a )–( c ) Topography images. ( d ) Height profiles of topography images. ( e )Width and depth compari... More
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E-V AFM lithography results with no-vibration and  x -vibration (vibration ...
Published Online: February 1, 2023
Fig. 4 E-V AFM lithography results with no-vibration and x -vibration (vibration amplitude = 0.6 VPP) comparison, with the same tip bias (2.1 V) applied. ( a ) Topography image of the nanopatterns. ( b ) Widths and depths of trenches fabricated with and without x -vibration. ( c ) and ( d ) Heig... More
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E-V AFM lithography results with no-vibration and  y -vibration (vibration ...
Published Online: February 1, 2023
Fig. 5 E-V AFM lithography results with no-vibration and y -vibration (vibration amplitude = 0.6 VPP) comparison, with the same tip bias (2.1 V) applied. ( a ) Topography image of the nanopatterns. ( b ) Widths and depths of trenches fabricated with and without y -vibration. ( c ) and ( d ) Heig... More
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E-V AFM lithography results with no-vibration and  x -vibration (vibration ...
Published Online: February 1, 2023
Fig. 6 E-V AFM lithography results with no-vibration and x -vibration (vibration amplitude = 0.8 VPP) comparison, with different speeds (50, 10, 0.5  μ m/s) and tip biases (0.5, 1.3, 2.1 V). ( a ) Topography image of nanopatterns. ( b ) and ( c ) Height profiles of nanotrenches. ( d ) Widths and ... More
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E-V AFM lithography results with no-vibration and  y -vibration (vibration ...
Published Online: February 1, 2023
Fig. 7 E-V AFM lithography results with no-vibration and y -vibration (vibration amplitude = 0.8 VPP), with different speeds (50, 10, 0.5  μ m/s) and tip biases (0.5, 1.3, 2.1 V). The dotted rectangles show feature with sub-10 nm size (close to 5 nm) under 50  μ m/s patterning speed and 2.1 V tip... More