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Journal Articles

Electrical Conductivity and Structural Evolution of Polymer-Derived SiC Ceramics Pyrolyzed From 1200 °C to 1800 °C

Md Atiqur Rahman Chowdhury, Kewei Wang, Yujun Jia, Chengying Xu
Journal: Journal of Micro and Nano-Manufacturing
Article Type: Technical Briefs
J. Micro Nano-Manuf. June 2020, 8(2): 024502.
Paper No: JMNM-19-1047
https://doi.org/10.1115/1.4046191
Published Online: March 27, 2020
View Article titled, Electrical Conductivity and Structural Evolution of Polymer-Derived SiC Ceramics Pyrolyzed From 1200 °C to 1800 °C
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Topics: Carbon, Electrical conductivity, Polymers, Pyrolysis, Temperature, Silicon carbide ceramics, Crystals, Ceramics
Journal Articles

A Study on the Damage Layer Removal of Single-Crystal Silicon Wafer After Atmospheric-Pressure Plasma Etching

Weijia Guo, Senthil Kumar Anantharajan, Xinquan Zhang, Hui Deng
Journal: Journal of Micro and Nano-Manufacturing
Article Type: Technical Briefs
J. Micro Nano-Manuf. June 2020, 8(2): 024501.
Paper No: JMNM-19-1045
https://doi.org/10.1115/1.4046377
Published Online: March 27, 2020
View Article titled, A Study on the Damage Layer Removal of Single-Crystal Silicon Wafer After Atmospheric-Pressure Plasma Etching
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Topics: Atmospheric pressure, Crystals, Damage, Etching, Plasma etching, Plasmas (Ionized gases), Semiconductor wafers, Silicon, Surface roughness
Journal Articles

Special Section on Recent Advancements in Micro- and Nano‐manufacturing From the WCMNM2018—Part 1

Irene Fassi, Lawrence Kulinsky, Martin Byung-Guk Jun
Journal: Journal of Micro and Nano-Manufacturing
Article Type: Guest Editorial
J. Micro Nano-Manuf. March 2019, 7(1): 010301.
Paper No: JMNM-19-1015
https://doi.org/10.1115/1.4043692
Published Online: May 17, 2019
View Article titled, Special Section on Recent Advancements in Micro- and Nano‐manufacturing From the WCMNM2018—Part 1
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Topics: Micromanufacturing, Nanomanufacturing, Additive manufacturing, Lasers, Manufacturing, Micromilling, Vibration, Adhesion, Carbon, Cathode ray oscilloscopes
Journal Articles

Design of Tool for Exfoliation of Monocrystalline Microscale Silicon Films

Martin Ward, Michael Cullinan
Journal: Journal of Micro and Nano-Manufacturing
Article Type: Research-Article
J. Micro Nano-Manuf. March 2019, 7(1): 011003.
Paper No: JMNM-18-1067
https://doi.org/10.1115/1.4043420
Published Online: May 15, 2019
View Article titled, Design of Tool for Exfoliation of Monocrystalline Microscale Silicon Films
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Topics: Design, Engineering prototypes, Fracture (Materials), Semiconductor wafers, Silicon, Stress, Surface roughness, Tension, Thin films, Wedges
Journal Articles

Low Pressure Phase Transformations During High-Speed, High-Temperature Scratching of Silicon

Chirag Alreja, Sathyan Subbiah
Journal: Journal of Micro and Nano-Manufacturing
Article Type: Research-Article
J. Micro Nano-Manuf. December 2018, 6(4): 041001.
Paper No: JMNM-17-1039
https://doi.org/10.1115/1.4041508
Published Online: October 10, 2018
View Article titled, Low Pressure Phase Transformations During High-Speed, High-Temperature Scratching of Silicon
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Topics: Crystals, High temperature, Phase transitions, Pressure, Silicon, Temperature, Diamond turning, Diamonds
Journal Articles

Fast Fabrication of Superhydrophobic Titanium Alloy as Antibacterial Surface Using Nanosecond Laser Texturing

Deepak Patil, S. Aravindan, Mishi Kaushal Wasson, Vivekanandan P., P. V. Rao
Journal: Journal of Micro and Nano-Manufacturing
Article Type: Research-Article
J. Micro Nano-Manuf. March 2018, 6(1): 011002.
Paper No: JMNM-17-1019
https://doi.org/10.1115/1.4038093
Published Online: December 14, 2017
View Article titled, Fast Fabrication of Superhydrophobic Titanium Alloy as Antibacterial Surface Using Nanosecond Laser Texturing
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Topics: Annealing, Bacteria, Crystals, Lasers, Manufacturing, Titanium alloys, Water, Drops, Alloys, Risk
Journal Articles

Development of Highly Efficient Combined Polishing Method for Single-Crystal Silicon Carbide

Tsuneo Kurita, Koji Miyake, Kenji Kawata, Kiwamu Ashida, Tomohisa Kato
Journal: Journal of Micro and Nano-Manufacturing
Article Type: Research-Article
J. Micro Nano-Manuf. September 2017, 5(3): 031004.
Paper No: JMNM-16-1072
https://doi.org/10.1115/1.4036828
Published Online: June 7, 2017
View Article titled, Development of Highly Efficient Combined Polishing Method for Single-Crystal Silicon Carbide
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Topics: Crystals, Machining, Polishing, Semiconductor wafers, Silicon
Journal Articles

Fabrication and Characterization of Photonic Crystals in Photopolymer SZ2080 by Two-Photon Polymerization Using a Femtosecond Laser

Yinan Tian, Hyukjoon Kwon, Yung C. Shin, Galen B. King
Journal: Journal of Micro and Nano-Manufacturing
Article Type: Technical Briefs
J. Micro Nano-Manuf. September 2014, 2(3): 034501.
Paper No: JMNM-13-1041
https://doi.org/10.1115/1.4027737
Published Online: July 8, 2014
View Article titled, Fabrication and Characterization of Photonic Crystals in Photopolymer SZ2080 by Two-Photon Polymerization Using a Femtosecond Laser
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Topics: Crystals, Energy gap, Lasers, Manufacturing, Photons, Polymerization, Resolution (Optics), Photopolymers, Fourier transform infrared spectroscopy
Journal Articles

Laser Induced Chemical Deposition of Ferrihydrite Nanotubes: Exploring Growth Rate and Crystal Structure

Zhikun Liu, C. Richard Liu
Journal: Journal of Micro and Nano-Manufacturing
Article Type: Research-Article
J. Micro Nano-Manuf. March 2014, 2(1): 011001.
Paper No: JMNM-13-1066
https://doi.org/10.1115/1.4026546
Published Online: February 20, 2014
View Article titled, Laser Induced Chemical Deposition of Ferrihydrite Nanotubes: Exploring Growth Rate and Crystal Structure
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Topics: Crystal structure, Lasers, Nanotubes, Crystals