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Journal Articles

Electrical Conductivity and Structural Evolution of Polymer-Derived SiC Ceramics Pyrolyzed From 1200 °C to 1800 °C

Md Atiqur Rahman Chowdhury, Kewei Wang, Yujun Jia, Chengying Xu

J. Micro Nano-Manuf. June 2020, 8(2): 024502.

Paper No: JMNM-19-1047

DOI: https://doi.org/10.1115/1.4046191

Published Online: March 27, 2020

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Topics: Carbon, Electrical conductivity, Polymers, Pyrolysis, Temperature, Silicon carbide ceramics, Crystals, Ceramics

Journal Articles

A Study on the Damage Layer Removal of Single-Crystal Silicon Wafer After Atmospheric-Pressure Plasma Etching

Weijia Guo, Senthil Kumar Anantharajan, Xinquan Zhang, Hui Deng

J. Micro Nano-Manuf. June 2020, 8(2): 024501.

Paper No: JMNM-19-1045

DOI: https://doi.org/10.1115/1.4046377

Published Online: March 27, 2020

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Topics: Atmospheric pressure, Crystals, Damage, Etching, Plasma etching, Plasmas (Ionized gases), Semiconductor wafers, Silicon, Surface roughness

Journal Articles

Special Section on Recent Advancements in Micro- and Nano‐manufacturing From the WCMNM2018—Part 1

Irene Fassi, Lawrence Kulinsky, Martin Byung-Guk Jun

J. Micro Nano-Manuf. March 2019, 7(1): 010301.

Paper No: JMNM-19-1015

DOI: https://doi.org/10.1115/1.4043692

Published Online: May 17, 2019

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Topics: Micromanufacturing, Nanomanufacturing, Additive manufacturing, Lasers, Manufacturing, Micromilling, Vibration, Adhesion, Carbon, Cathode ray oscilloscopes

Journal Articles

Design of Tool for Exfoliation of Monocrystalline Microscale Silicon Films

Martin Ward, Michael Cullinan

J. Micro Nano-Manuf. March 2019, 7(1): 011003.

Paper No: JMNM-18-1067

DOI: https://doi.org/10.1115/1.4043420

Published Online: May 15, 2019

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Topics: Design, Engineering prototypes, Fracture (Materials), Semiconductor wafers, Silicon, Stress, Surface roughness, Tension, Thin films, Wedges

Journal Articles

Low Pressure Phase Transformations During High-Speed, High-Temperature Scratching of Silicon

Chirag Alreja, Sathyan Subbiah

J. Micro Nano-Manuf. December 2018, 6(4): 041001.

Paper No: JMNM-17-1039

DOI: https://doi.org/10.1115/1.4041508

Published Online: October 10, 2018

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Topics: Crystals, High temperature, Phase transitions, Pressure, Silicon, Temperature, Diamond turning, Diamonds

Journal Articles

Fast Fabrication of Superhydrophobic Titanium Alloy as Antibacterial Surface Using Nanosecond Laser Texturing

Deepak Patil, S. Aravindan, Mishi Kaushal Wasson, Vivekanandan P., P. V. Rao

J. Micro Nano-Manuf. March 2018, 6(1): 011002.

Paper No: JMNM-17-1019

DOI: https://doi.org/10.1115/1.4038093

Published Online: December 14, 2017

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Topics: Annealing, Bacteria, Crystals, Lasers, Manufacturing, Titanium alloys, Water, Drops, Alloys, Risk

Journal Articles

Development of Highly Efficient Combined Polishing Method for Single-Crystal Silicon Carbide

Tsuneo Kurita, Koji Miyake, Kenji Kawata, Kiwamu Ashida, Tomohisa Kato

J. Micro Nano-Manuf. September 2017, 5(3): 031004.

Paper No: JMNM-16-1072

DOI: https://doi.org/10.1115/1.4036828

Published Online: June 7, 2017

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Topics: Crystals, Machining, Polishing, Semiconductor wafers, Silicon

Journal Articles

Fabrication and Characterization of Photonic Crystals in Photopolymer SZ2080 by Two-Photon Polymerization Using a Femtosecond Laser

Yinan Tian, Hyukjoon Kwon, Yung C. Shin, Galen B. King

J. Micro Nano-Manuf. September 2014, 2(3): 034501.

Paper No: JMNM-13-1041

DOI: https://doi.org/10.1115/1.4027737

Published Online: July 8, 2014

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Topics: Crystals, Energy gap, Lasers, Manufacturing, Photons, Polymerization, Resolution (Optics), Photopolymers, Fourier transform infrared spectroscopy

Journal Articles

Laser Induced Chemical Deposition of Ferrihydrite Nanotubes: Exploring Growth Rate and Crystal Structure

Zhikun Liu, C. Richard Liu

J. Micro Nano-Manuf. March 2014, 2(1): 011001.

Paper No: JMNM-13-1066

DOI: https://doi.org/10.1115/1.4026546

Published Online: February 20, 2014

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Topics: Crystal structure, Lasers, Nanotubes, Crystals

Journal citation

NARROW

Electrical Conductivity and Structural Evolution of Polymer-Derived SiC Ceramics Pyrolyzed From 1200 °C to 1800 °C

A Study on the Damage Layer Removal of Single-Crystal Silicon Wafer After Atmospheric-Pressure Plasma Etching

Special Section on Recent Advancements in Micro- and Nano‐manufacturing From the WCMNM2018—Part 1

Design of Tool for Exfoliation of Monocrystalline Microscale Silicon Films

Low Pressure Phase Transformations During High-Speed, High-Temperature Scratching of Silicon

Fast Fabrication of Superhydrophobic Titanium Alloy as Antibacterial Surface Using Nanosecond Laser Texturing

Development of Highly Efficient Combined Polishing Method for Single-Crystal Silicon Carbide

Fabrication and Characterization of Photonic Crystals in Photopolymer SZ2080 by Two-Photon Polymerization Using a Femtosecond Laser

Laser Induced Chemical Deposition of Ferrihydrite Nanotubes: Exploring Growth Rate and Crystal Structure

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