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Journal Articles

Simultaneous Micro- and Nanoscale Silicon Fabrication by Metal-Assisted Chemical Etch

Raul Lema Galindo, Paras Ajay, S V Sreenivasan

J. Micro Nano-Manuf.

Paper No: JMNM-22-1035

DOI: https://doi.org/10.1115/1.4062167

Published Online: March 21, 2023

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Topics: Etching, Manufacturing, Metals, Nanoscale phenomena, Silicon, Plasma etching, Nanowires, Flow (Dynamics), Hardware, Microscale devices

Journal Articles

The Irradiance-Based Growth of Surface Structures Induced by Nanosecond Laser Pulses on Si and Ge and Their Correlation With Plasma Ion Kinetic Energies and Densities

Haroon Ahmad, Shazia Bashir, Asma Hayat, Khaliq Mahmood, Ghulam Ghous

J. Micro Nano-Manuf. March 2022, 10(1): 011002.

Paper No: JMNM-22-1005

DOI: https://doi.org/10.1115/1.4054337

Published Online: April 28, 2022

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Topics: Lasers, Plasmas (Ionized gases)

Journal Articles

Simulation of Ultrashort Laser Pulse Absorption at the Water–Metal Interface in Laser-Induced Plasma Micromachining

Jiaxi Xie, Kornel Ehmann, Jian Cao

J. Micro Nano-Manuf. December 2020, 8(4): 041009.

Paper No: JMNM-20-1028

DOI: https://doi.org/10.1115/1.4049360

Published Online: January 22, 2021

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Topics: Absorption, Electrons, Ionization, Lasers, Metals, Plasmas (Ionized gases), Simulation, Water, Micromachining, Aluminum

Journal Articles

Surface Morphology and Wall Angle Comparison of Microchannels Fabricated in Titanium Alloy Using Laser-Based Processes

Suman Bhandari, Nicolas Martinez-Prieto, Jian Cao, Kornel Ehmann

J. Micro Nano-Manuf. June 2020, 8(2): 021001.

Paper No: JMNM-19-1075

DOI: https://doi.org/10.1115/1.4046283

Published Online: March 27, 2020

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Topics: Laser ablation, Lasers, Microchannels, Titanium alloys, Scanning electron microscopes, Plasmas (Ionized gases), Ablation (Vaporization technology), Finishes

Journal Articles

A Study on the Damage Layer Removal of Single-Crystal Silicon Wafer After Atmospheric-Pressure Plasma Etching

Weijia Guo, Senthil Kumar Anantharajan, Xinquan Zhang, Hui Deng

J. Micro Nano-Manuf. June 2020, 8(2): 024501.

Paper No: JMNM-19-1045

DOI: https://doi.org/10.1115/1.4046377

Published Online: March 27, 2020

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Topics: Atmospheric pressure, Crystals, Damage, Etching, Plasma etching, Plasmas (Ionized gases), Semiconductor wafers, Silicon, Surface roughness

Journal Articles

Universally Applicable Fabrication Technique for Biomimetic Nanocone Arrays on Flexible Polymer Substrates for Anti-Reflection Functionality

Yupeng Li, Xia Liu, Xiaoyu Li, Bao Zhu, Mingkai Lei, Akhlesh Lakhtakia

J. Micro Nano-Manuf. December 2019, 7(4): 041003.

Paper No: JMNM-19-1011

DOI: https://doi.org/10.1115/1.4044987

Published Online: October 21, 2019

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Topics: Manufacturing, Plasmas (Ionized gases), Polymers, Reflection, Nanostructures , Reflectance, Biomimetics, Refractive index, Wavelength, Nanowires

Journal Articles

Plasma Printing of Micronozzles With Complex Shaped Outlets Into Stainless Steel Sheets

Tatsuhiko Aizawa, Kenji Wasa

J. Micro Nano-Manuf. September 2019, 7(3): 034502.

Paper No: JMNM-18-1045

DOI: https://doi.org/10.1115/1.4043958

Published Online: October 9, 2019

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Topics: Micronozzles, Nitriding, Nitrogen, Plasmas (Ionized gases), Printing, Stainless steel, Chemical etching, Maskless lithography, Manufacturing

Journal Articles

The Fabrication and Characterization of Spark Plasma Sintered Nickel Based Binary Alloy at Different Heating Rate

B. J. Babalola, M. B. Shongwe, A. L. Rominiyi, P. L. Lepele, A. P. I. Popoola

J. Micro Nano-Manuf. September 2019, 7(3): 031004.

Paper No: JMNM-19-1005

DOI: https://doi.org/10.1115/1.4044267

Published Online: July 29, 2019

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Topics: Alloys, Heating, Nickel, Plasmas (Ionized gases), Sintering, Mechanical properties

Journal Articles

Effect of Dielectric Conductivity on Micro-Electrical Discharge Machining Plasma Characteristics Using Optical Emission Spectroscopy

Soham S. Mujumdar, Davide Curreli, Shiv G. Kapoor

J. Micro Nano-Manuf. September 2018, 6(3): 031001.

Paper No: JMNM-17-1025

DOI: https://doi.org/10.1115/1.4039508

Published Online: April 23, 2018

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Topics: Density, Electrical conductivity, Electrical discharge machining, Electrons, Plasmas (Ionized gases), Temperature, Emission spectroscopy

Journal Articles

Fabrication of Micro Diamond-Like Carbon-Nozzles by Plasma Oxidation Printing

Tatsuhiko Aizawa, Hiroshi Tamagaki, Kenji Wasa

J. Micro Nano-Manuf. June 2018, 6(2): 021007.

Paper No: JMNM-16-1070

DOI: https://doi.org/10.1115/1.4039358

Published Online: March 30, 2018

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Topics: Carbon, Diamond films, Diamonds, Nozzles, Oxidation, Plasmas (Ionized gases), Printing, Manufacturing, Micronozzles, Etching

Journal Articles

Microtexturing Into AISI-SUS420 Molds for Injection Molding Via Plasma Nitriding

T. Aizawa, H. Suga, T. Nagata, T. Yamaguchi

J. Micro Nano-Manuf. June 2017, 5(2): 021004.

Paper No: JMNM-15-1070

DOI: https://doi.org/10.1115/1.4035953

Published Online: March 23, 2017

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Topics: Injection molding, Nitriding, Plasmas (Ionized gases), Inks, Sands, Blasting, Hardening, Density

Journal Articles

Effect of Dielectric Electrical Conductivity on the Characteristics of Micro Electro-Discharge Machining Plasma and Material Removal

Soham S. Mujumdar, Davide Curreli, Shiv G. Kapoor

J. Micro Nano-Manuf. June 2016, 4(2): 021006.

Paper No: JMNM-15-1085

DOI: https://doi.org/10.1115/1.4033344

Published Online: April 21, 2016

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Topics: Electrical conductivity, Electrical discharge machining, Plasmas (Ionized gases), Thermal conductivity, Breakdown (Electricity), Water

Journal Articles

H 2 Mole Fraction Measurements in a Microwave Plasma Using Coherent Anti-Stokes Raman Scattering Spectroscopy

Alfredo D. Tuesta, Aizaz Bhuiyan, Robert P. Lucht, Timothy S. Fisher

J. Micro Nano-Manuf. March 2016, 4(1): 011005.

Paper No: JMNM-15-1053

DOI: https://doi.org/10.1115/1.4031916

Published Online: December 15, 2015

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Topics: Plasmas (Ionized gases), Temperature, Spectra (Spectroscopy), Microwaves, Methane, Pressure, Automobiles

Journal Articles

Model-Based Prediction of Plasma Resistance, and Discharge Voltage and Current Waveforms in Micro-Electrodischarge Machining

Soham S. Mujumdar, Davide Curreli, Shiv G. Kapoor, David Ruzic

J. Micro Nano-Manuf. March 2016, 4(1): 011003.

Paper No: JMNM-15-1041

DOI: https://doi.org/10.1115/1.4031773

Published Online: October 29, 2015

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Topics: Plasmas (Ionized gases), Electrical discharge machining, Circuits

Journal Articles

Design of a Compact Biaxial Tensile Stage for Fabrication and Tuning of Complex Micro- and Nano-scale Wrinkle Patterns

Sourabh K. Saha, Martin L. Culpepper

J. Micro Nano-Manuf. December 2015, 3(4): 041004.

Paper No: JMNM-14-1077

DOI: https://doi.org/10.1115/1.4031382

Published Online: September 14, 2015

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Topics: Design, Manufacturing, Plasma desorption mass spectrometry, Plasmas (Ionized gases), Thin films, Nanoscale phenomena

Journal Articles

Laser-Induced Plasma Micromachining Process: Principles and Performance

Kumar Pallav, Ishan Saxena, K. F. Ehmann

J. Micro Nano-Manuf. September 2015, 3(3): 031004.

Paper No: JMNM-15-1008

DOI: https://doi.org/10.1115/1.4030706

Published Online: September 1, 2015

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Topics: Lasers, Plasmas (Ionized gases), Machining

Journal Articles

High-Speed Fabrication of Microchannels Using Line-Based Laser Induced Plasma Micromachining

Ishan Saxena, Rajiv Malhotra, Kornel Ehmann, Jian Cao

J. Micro Nano-Manuf. June 2015, 3(2): 021006.

Paper No: JMNM-14-1066

DOI: https://doi.org/10.1115/1.4029935

Published Online: June 1, 2015

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Topics: Lasers, Lenses (Optics), Microchannels, Micromachining, Plasmas (Ionized gases), Manufacturing, Shapes

Journal Articles

Laser Diagnostics of Plasma in Synthesis of Graphene-Based Materials

Alfredo D. Tuesta, Aizaz Bhuiyan, Robert P. Lucht, Timothy S. Fisher

J. Micro Nano-Manuf. September 2014, 2(3): 031002.

Paper No: JMNM-14-1010

DOI: https://doi.org/10.1115/1.4027547

Published Online: July 8, 2014

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Topics: Plasmas (Ionized gases), Pressure, Temperature, Methane, Microwaves, Graphene, Automobiles

Journal Articles

Multimaterial Capability of Laser Induced Plasma Micromachining

Ishan Saxena, Kornel F. Ehmann

J. Micro Nano-Manuf. September 2014, 2(3): 031005.

Paper No: JMNM-14-1020

DOI: https://doi.org/10.1115/1.4027811

Published Online: July 8, 2014

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Topics: Heat, Laser ablation, Lasers, Microchannels, Micromachining, Plasmas (Ionized gases), Surface roughness, Machining, Titanium, Nickel

Journal Articles

Comparative Assessment of the Laser-Induced Plasma Micromachining and the Ultrashort Pulsed Laser Ablation Processes

Kumar Pallav, Ishan Saxena, Kornel F. Ehmann

J. Micro Nano-Manuf. September 2014, 2(3): 031001.

Paper No: JMNM-13-1077

DOI: https://doi.org/10.1115/1.4027738

Published Online: July 8, 2014

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Topics: Laser ablation, Lasers, Machining, Microchannels, Micromachining, Plasmas (Ionized gases), Stainless steel, Energy levels (Quantum mechanics), Ablation (Vaporization technology), Laser beams

Journal citation

NARROW

Manuscript

Simultaneous Micro- and Nanoscale Silicon Fabrication by Metal-Assisted Chemical Etch

The Irradiance-Based Growth of Surface Structures Induced by Nanosecond Laser Pulses on Si and Ge and Their Correlation With Plasma Ion Kinetic Energies and Densities

Simulation of Ultrashort Laser Pulse Absorption at the Water–Metal Interface in Laser-Induced Plasma Micromachining

Surface Morphology and Wall Angle Comparison of Microchannels Fabricated in Titanium Alloy Using Laser-Based Processes

A Study on the Damage Layer Removal of Single-Crystal Silicon Wafer After Atmospheric-Pressure Plasma Etching

Universally Applicable Fabrication Technique for Biomimetic Nanocone Arrays on Flexible Polymer Substrates for Anti-Reflection Functionality

Plasma Printing of Micronozzles With Complex Shaped Outlets Into Stainless Steel Sheets

The Fabrication and Characterization of Spark Plasma Sintered Nickel Based Binary Alloy at Different Heating Rate

Effect of Dielectric Conductivity on Micro-Electrical Discharge Machining Plasma Characteristics Using Optical Emission Spectroscopy

Fabrication of Micro Diamond-Like Carbon-Nozzles by Plasma Oxidation Printing

Microtexturing Into AISI-SUS420 Molds for Injection Molding Via Plasma Nitriding

Effect of Dielectric Electrical Conductivity on the Characteristics of Micro Electro-Discharge Machining Plasma and Material Removal

H 2 Mole Fraction Measurements in a Microwave Plasma Using Coherent Anti-Stokes Raman Scattering Spectroscopy

Model-Based Prediction of Plasma Resistance, and Discharge Voltage and Current Waveforms in Micro-Electrodischarge Machining

Design of a Compact Biaxial Tensile Stage for Fabrication and Tuning of Complex Micro- and Nano-scale Wrinkle Patterns

Laser-Induced Plasma Micromachining Process: Principles and Performance

High-Speed Fabrication of Microchannels Using Line-Based Laser Induced Plasma Micromachining

Laser Diagnostics of Plasma in Synthesis of Graphene-Based Materials

Multimaterial Capability of Laser Induced Plasma Micromachining

Comparative Assessment of the Laser-Induced Plasma Micromachining and the Ultrashort Pulsed Laser Ablation Processes

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