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Journal Articles

Wafer Edge Metrology and Inspection Technique Using Curved-Edge Diffractive Fringe Pattern Analysis

Kuan Lu, Zhikun Wang, Heebum Chun, ChaBum Lee
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. July 2024, 146(7): 070908.
Paper No: MANU-23-1366
https://doi.org/10.1115/1.4065639
Published Online: June 10, 2024
View Article titled, Wafer Edge Metrology and Inspection Technique Using Curved-Edge Diffractive Fringe Pattern Analysis
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Topics: Diffraction patterns, Imaging, Inspection, Metrology, Semiconductor wafers, Feature extraction, Particulate matter
Journal Articles

Hole Edge Metrology and Inspection by Edge Diffractometry

Kuan Lu, ChaBum Lee
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. July 2024, 146(7): 070905.
Paper No: MANU-24-1019
https://doi.org/10.1115/1.4065314
Published Online: April 29, 2024
View Article titled, Hole Edge Metrology and Inspection by Edge Diffractometry
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Topics: Diffraction, Diffraction patterns, Inspection, Metrology, Surface roughness, Geometry
Proceedings Papers

A Fringe Pattern Analysis Technique for Photomask Line-Edge-Roughness Characterization

Zhikun Wang, Kuan Lu, ChaBum Lee
Proc. ASME. MSEC2023, Volume 2: Manufacturing Equipment and Automation; Manufacturing Processes; Manufacturing Systems; Nano/Micro/Meso Manufacturing; Quality and Reliability, V002T06A007, June 12–16, 2023
Publisher: American Society of Mechanical Engineers
Paper No: MSEC2023-103862
https://doi.org/10.1115/MSEC2023-103862
View Paper titled, A Fringe Pattern Analysis Technique for Photomask Line-Edge-Roughness Characterization
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Topics: Diffraction patterns, Photomasks, Surface roughness
Journal Articles

Performance Study of Battery Thermal Management System With a Bionic Cooling Plate Based on Leaf Vein Channels of Plantain

Zhiguo Tang, Ran Sun, Kuan Lu, Jianping Cheng
Journal: Journal of Thermal Science and Engineering Applications
Publisher: ASME
Article Type: Research Papers
J. Thermal Sci. Eng. Appl. December 2023, 15(12): 121003.
Paper No: TSEA-23-1216
https://doi.org/10.1115/1.4063244
Published Online: September 12, 2023
View Article titled, Performance Study of Battery Thermal Management System With a Bionic Cooling Plate Based on Leaf Vein Channels of Plantain
Open the PDF for Performance Study of Battery Thermal Management System With a Bionic Cooling Plate Based on Leaf Vein Channels of Plantain in another window
Topics: Batteries, Bionics, Coolants, Cooling, Temperature, Thermal management, Temperature uniformity, Flow (Dynamics)
Journal Articles

Stochastic Analysis of Lubrication in Misaligned Journal Bearings

Jiaojiao Ma, Chao Fu, Weidong Zhu, Kuan Lu, Yongfeng Yang
Journal: Journal of Tribology
Publisher: ASME
Article Type: Research Papers
J. Tribol. August 2022, 144(8): 081802.
Paper No: TRIB-21-1489
https://doi.org/10.1115/1.4053626
Published Online: February 25, 2022
View Article titled, Stochastic Analysis of Lubrication in Misaligned Journal Bearings
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Topics: Journal bearings, Lubrication, Lubricants, Bearings, Viscosity