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Journal Articles

Three-Dimensional Profile Reconstruction and Internal Defect Detection of Silicon Wafers Using Cascaded Fiber Optic Fabry–Pérot Interferometer and Leaky Field Detection Technologies

Fengfeng Zhou, Xingyu Fu, Siying Chen, Changheon Han, Martin B. G. Jun
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. July 2024, 146(7): 070907.
Paper No: MANU-23-1611
https://doi.org/10.1115/1.4065523
Published Online: June 3, 2024
View Article titled, Three-Dimensional Profile Reconstruction and Internal Defect Detection of Silicon Wafers Using Cascaded Fiber Optic Fabry–Pérot Interferometer and Leaky Field Detection Technologies
Open the PDF for Three-Dimensional Profile Reconstruction and Internal Defect Detection of Silicon Wafers Using Cascaded Fiber Optic Fabry–Pérot Interferometer and Leaky Field Detection Technologies in another window
Topics: Fibers, Flaw detection, Interferometers, Semiconductor wafers, Leakage, Optical fiber, Refractive index, Wavelength
Journal Articles

Machine Straightness Error Measurement Based on Optical Fiber Fabry–Pérot Interferometer Monitoring Technique

Xingyu Fu, Fengfeng Zhou, Huitaek Yun, Eunseob Kim, Siying Chen, Martin Byung-Guk Jun
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. January 2023, 145(1): 011007.
Paper No: MANU-22-1325
https://doi.org/10.1115/1.4055897
Published Online: October 18, 2022
View Article titled, Machine Straightness Error Measurement Based on Optical Fiber Fabry–Pérot Interferometer Monitoring Technique
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Topics: Errors, Interferometers, Machinery, Optical fiber, Sensors, Fibers
Proceedings Papers

Process Monitoring in Automatic Assembly of Minilenses With Fiberscopes

Tian Lan, Siying Chen, Guoqiang Ni
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 1449-1452, January 10–13, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MNC2007-21411
https://doi.org/10.1115/MNC2007-21411
View Paper titled, Process Monitoring in Automatic Assembly of Minilenses With Fiberscopes
Open the PDF for Process Monitoring in Automatic Assembly of Minilenses With Fiberscopes in another window
Topics: Manufacturing, Process monitoring