We investigate the static and dynamic behavior of a multilayer clamped-free–clamped-free (CFCF) microplate, which is made of polyimide, gold, chromium, and nickel. The microplate is slightly curved away from a stationary electrode and is electrostatically actuated. The free and forced vibrations of the microplate are examined. First, we experimentally investigate the variation of the first natural frequency under the electrostatic direct current (DC) load. Then, the forced dynamic behavior is investigated by applying a harmonic alternating current (AC) voltage superimposed to a DC voltage. Results are shown demonstrating the transition of the dynamic response of the microplate from hardening to softening as the DC voltage is changed as well the dynamic pull-in phenomenon. For the theoretical model, we adopt a dynamic analog of the von Karman governing equations accounting for initial curvature imperfection. These equations are then used to develop a reduced-order model (ROM) based on the Galerkin procedure to simulate the mechanical behavior of the microplate. We compare the theoretical results with the experimental data and show excellent agreement among the results. We also examine the effect of the initial rise on the natural frequencies of first three symmetric–symmetric modes of the plate.
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August 2017
Research-Article
An Experimental and Theoretical Investigation of the Mechanical Behavior of Multilayer Initially Curved Microplates Under Electrostatic Actuation
S. Saghir,
S. Saghir
Physical Science and Engineering Division,
King Abdullah University of Science
and Technology (KAUST),
P. O. Box 4700,
Thuwal 23955-6900, Saudi Arabia;
King Abdullah University of Science
and Technology (KAUST),
P. O. Box 4700,
Thuwal 23955-6900, Saudi Arabia;
Mechanical Engineering Department,
University of Management and
Technology (UMT),
Daska Road,
Sialkot 51310, Pakistan
University of Management and
Technology (UMT),
Daska Road,
Sialkot 51310, Pakistan
Search for other works by this author on:
S. Ilyas,
S. Ilyas
Physical Science and Engineering Division,
King Abdullah University of Science
and Technology (KAUST),
P. O. Box 4700,
Thuwal 23955-6900, Saudi Arabia
King Abdullah University of Science
and Technology (KAUST),
P. O. Box 4700,
Thuwal 23955-6900, Saudi Arabia
Search for other works by this author on:
N. Jaber,
N. Jaber
Physical Science and Engineering Division,
King Abdullah University of Science
and Technology (KAUST),
P. O. Box 4700,
Thuwal 23955-6900, Saudi Arabia
King Abdullah University of Science
and Technology (KAUST),
P. O. Box 4700,
Thuwal 23955-6900, Saudi Arabia
Search for other works by this author on:
M. I. Younis
M. I. Younis
Physical Science and Engineering Division,
King Abdullah University of Science
and Technology (KAUST),
P. O. Box 4700,
Thuwal 23955-6900, Saudi Arabia
e-mail: mohammad.younis@kaust.edu.sa
King Abdullah University of Science
and Technology (KAUST),
P. O. Box 4700,
Thuwal 23955-6900, Saudi Arabia
e-mail: mohammad.younis@kaust.edu.sa
Search for other works by this author on:
S. Saghir
Physical Science and Engineering Division,
King Abdullah University of Science
and Technology (KAUST),
P. O. Box 4700,
Thuwal 23955-6900, Saudi Arabia;
King Abdullah University of Science
and Technology (KAUST),
P. O. Box 4700,
Thuwal 23955-6900, Saudi Arabia;
Mechanical Engineering Department,
University of Management and
Technology (UMT),
Daska Road,
Sialkot 51310, Pakistan
University of Management and
Technology (UMT),
Daska Road,
Sialkot 51310, Pakistan
S. Ilyas
Physical Science and Engineering Division,
King Abdullah University of Science
and Technology (KAUST),
P. O. Box 4700,
Thuwal 23955-6900, Saudi Arabia
King Abdullah University of Science
and Technology (KAUST),
P. O. Box 4700,
Thuwal 23955-6900, Saudi Arabia
N. Jaber
Physical Science and Engineering Division,
King Abdullah University of Science
and Technology (KAUST),
P. O. Box 4700,
Thuwal 23955-6900, Saudi Arabia
King Abdullah University of Science
and Technology (KAUST),
P. O. Box 4700,
Thuwal 23955-6900, Saudi Arabia
M. I. Younis
Physical Science and Engineering Division,
King Abdullah University of Science
and Technology (KAUST),
P. O. Box 4700,
Thuwal 23955-6900, Saudi Arabia
e-mail: mohammad.younis@kaust.edu.sa
King Abdullah University of Science
and Technology (KAUST),
P. O. Box 4700,
Thuwal 23955-6900, Saudi Arabia
e-mail: mohammad.younis@kaust.edu.sa
1Corresponding author.
Contributed by the Technical Committee on Vibration and Sound of ASME for publication in the JOURNAL OF VIBRATION AND ACOUSTICS. Manuscript received November 28, 2016; final manuscript received March 14, 2017; published online May 30, 2017. Assoc. Editor: Slava Krylov.
J. Vib. Acoust. Aug 2017, 139(4): 040901 (11 pages)
Published Online: May 30, 2017
Article history
Received:
November 28, 2016
Revised:
March 14, 2017
Citation
Saghir, S., Ilyas, S., Jaber, N., and Younis, M. I. (May 30, 2017). "An Experimental and Theoretical Investigation of the Mechanical Behavior of Multilayer Initially Curved Microplates Under Electrostatic Actuation." ASME. J. Vib. Acoust. August 2017; 139(4): 040901. https://doi.org/10.1115/1.4036398
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